Compliant universal substrates for optoelectronic and electronic devices
文献类型：专利
| 作者 | HWANG, WEN-YEN; ZHOU, YUCAI; ZHU, ZUHUA; LO, YU-HWA |
| 发表日期 | 2002-06-18 |
| 专利号 | US6406795 |
| 著作权人 | APPLIED OPTOELECTRONICS, INC . |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Compliant universal substrates for optoelectronic and electronic devices |
| 英文摘要 | A compliant substrate for the formation of semiconductor devices includes a crystalline base layer and a thin-film crystalline layer on and loosely bonded to the base layers. The thin-film layer has a high degree of lattice flexibility. A compliant substrate for formation of semiconductor devices may also include a crystalline base layer, and, on the base layer, a thin film layer having a lattice constant different from the lattice constant of the base layer. A method for formation of a compliant substrate for formation of semiconductor devices includes forming a thin film layer on a first substrate, bonding a first surface of the thin film layer to a surface of a second substrate having a lattice constant different from the lattice constant of the thin film layer either with or without twist bonding, and removing the first substrate to expose a second surface of the thin film layer. |
| 公开日期 | 2002-06-18 |
| 申请日期 | 1999-10-25 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/36605]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | APPLIED OPTOELECTRONICS, INC . |
| 推荐引用方式 GB/T 7714 | HWANG, WEN-YEN,ZHOU, YUCAI,ZHU, ZUHUA,et al. Compliant universal substrates for optoelectronic and electronic devices. US6406795. 2002-06-18. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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