中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor light emitting device and method for manufacturing the same

文献类型:专利

作者KURAMACHI, TERUHIKO, C/O FUJI PHOTO FILM CO., LTD.
发表日期2006-05-31
专利号EP1039596B1
著作权人FUJIFILM CORPORATION
国家欧洲专利局
文献子类授权发明
其他题名Semiconductor light emitting device and method for manufacturing the same
英文摘要On a heat sink 1 comprising Cu or CuW, which has a low thermal resistance, an Ni thin film layer is formed by using the plating method at a film thickness of 2 µm to 6 µm. Thereafter, on the face to which a semiconductor light emitting element 5 is to be bonded and the face on the side from which light is to be emitted, a barrier metallic layer 2 comprising Ni or Ti which will not directly react with copper is formed by vapor deposition and the sputtering film formation method at a film thickness of 50 nm to 150 nm in the region as wide as four times the area of the bonding face of the semiconductor light emitting element 5. Thereon, a wettability improving metallic layer 3 of Pd or Pt to improve the wetting with solder is formed consecutively in the same vacuum at a film thickness of 50 nm to 150 nm. Here, the semiconductor light emitting element 5 produced by stacking an AlGaAs layer, a GaAs layer, a GaAsP layer, and an InGaAs layer on a GaAs substrate, and thereafter, forming an N electrode comprising AuGe/Ni/Au and a P electrode comprising Au/Pt/Ti/Pt/Ti is pressed against the bonding face of said heat sink 1 with a load of 10 g to 30 g, while an In solder 4 is melted at a temperature of approx. 200°C to 250 °C, which is followed by cooling and fixing.
公开日期2006-05-31
申请日期2000-03-17
状态授权
源URL[http://ir.opt.ac.cn/handle/181661/36644]  
专题半导体激光器专利数据库
作者单位FUJIFILM CORPORATION
推荐引用方式
GB/T 7714
KURAMACHI, TERUHIKO, C/O FUJI PHOTO FILM CO., LTD.. Semiconductor light emitting device and method for manufacturing the same. EP1039596B1. 2006-05-31.

入库方式: OAI收割

来源:西安光学精密机械研究所

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