Optical microswitch having electrostatic microactuator
文献类型：专利
| 作者 | HURST, JR., JERRY E.; DRAKE, JOSEPH; WILDE, JEFFREY P.; DAVIS, JOSEPH E.; HEANUE, JOHN F.; PETERSEN, KURT E.; MCDANIEL, TERRY; DRAZAN, JEFF |
| 发表日期 | 2002-03-19 |
| 专利号 | US6360035 |
| 著作权人 | SEAGATE TECHNOLOGY LLC |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Optical microswitch having electrostatic microactuator |
| 英文摘要 | An optical microswitch for use with a laser beam comprising a support body and first and second output fibers carried by the body. An electrostatic microactuator is carried by the body and extends in a plane. A micromirror is disposed out of the plane. The microactuator has a mirror holder coupled to the micromirror and at least one comb drive assembly coupled to the mirror holder for driving the micromirror about an axis of rotation extending perpendicular to the plane between a first position for reflecting the laser beam to the first output fiber and a second position for reflecting the laser beam to the second output fiber. |
| 公开日期 | 2002-03-19 |
| 申请日期 | 2000-06-02 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/36661]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | SEAGATE TECHNOLOGY LLC |
| 推荐引用方式 GB/T 7714 | HURST, JR., JERRY E.,DRAKE, JOSEPH,WILDE, JEFFREY P.,et al. Optical microswitch having electrostatic microactuator. US6360035. 2002-03-19. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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