Optical waveguide, optical module, and their fabrication method
文献类型：专利
| 作者 | IDO, TATEMI; NAGARA, TAKAMITSU |
| 发表日期 | 2003-12-30 |
| 专利号 | US6671438 |
| 著作权人 | HITACHI CHEMICAL COMPANY, LTD. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Optical waveguide, optical module, and their fabrication method |
| 英文摘要 | It is a problem of disclosed technology to provide a polymer optical waveguide substrate having a V-groove for fiber alignment providing optical coupling with an optical fiber with low loss.According to a resolution means therefor, there is provided an optical waveguide member characterized in that an optical waveguide is formed at a portion over a silicon substrate, a core or a clad of the optical waveguide comprises a polymer resin, a groove in a shape of V for positioning and fixing an optical fiber to the optical waveguide is provided to the silicon substrate and a groove in a rectangular shape extended in a direction orthogonal to the groove in the shape of V at a boundary of the V-groove and the optical waveguide, is provided to the silicon substrate, a film thickness of the core or the clad constituting the optical waveguide becomes thinner at a vicinity of the boundary than a film thickness of other portion and the shape of the groove having the shape of V is set such that when the optical fiber is mounted to the V-groove in the shape of V, a height of a center of a core of the optical fiber becomes lower than a height of the core of the optical waveguide at a position sufficiently remote from the boundary and highly efficient optical coupling is achieved between the optical fiber and the optical waveguide. |
| 公开日期 | 2003-12-30 |
| 申请日期 | 2001-03-15 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/36734]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | HITACHI CHEMICAL COMPANY, LTD. |
| 推荐引用方式 GB/T 7714 | IDO, TATEMI,NAGARA, TAKAMITSU. Optical waveguide, optical module, and their fabrication method. US6671438. 2003-12-30. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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