中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Optical coupling structures and the fabrication processes

文献类型:专利

作者YOSHIMURA, TETSUZO; TAKAHASHI, YASUHITO; ROMAN, JAMES; MCCORMACK, MARK THOMAS; BEILIN, SOLOMON I.; WANG, WEN-CHOU VINCENT; INAO, MASAAKI
发表日期2004-01-27
专利号US6684007
著作权人FUJITSU LIMITED
国家美国
文献子类授权发明
其他题名Optical coupling structures and the fabrication processes
英文摘要An optical apparatus including an optical substrate having an embedded waveguide and an optical device adapted to receive light transmitted from an end of the waveguide. The optical apparatus includes a coupling structure for coupling the optical device to the substrate. The coupling structure has a thin metallic layer with an aperture. At least a portion of the optical device is disposed in the aperture. A method for making an optical apparatus comprising forming an optical substrate having a waveguide embedded therein; depositing a metal layer over an end of the waveguide; and depositing a polymeric layer over the metal layer. An aperture is formed in the metal layer and in the polymeric layer by removing a portion of the metal layer and a portion of the polymeric layer disposed over the end of the waveguide. The method for making an optical apparatus also comprises inserting at least a portion of an optical device within the aperture so that the optical device is positioned to receive light from the first end of the waveguide.
公开日期2004-01-27
申请日期2001-05-09
状态授权
源URL[http://ir.opt.ac.cn/handle/181661/36749]  
专题半导体激光器专利数据库
作者单位FUJITSU LIMITED
推荐引用方式
GB/T 7714
YOSHIMURA, TETSUZO,TAKAHASHI, YASUHITO,ROMAN, JAMES,et al. Optical coupling structures and the fabrication processes. US6684007. 2004-01-27.

入库方式: OAI收割

来源:西安光学精密机械研究所

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