3D optoelectronic micro system
文献类型：专利
| 作者 | YOSHIMURA, TETSUZO; ARAI, YUKIHIKO |
| 发表日期 | 2008-06-17 |
| 专利号 | US7387913 |
| 著作权人 | JSR CORPORATION |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | 3D optoelectronic micro system |
| 英文摘要 | A 3D micro optical switching system (3D-MOSS) is fabricated by dividing an optical switching system into several blocks, creating optoelectronic layers where optical switches or tunable filters in each block are disposed, laminating the optoelectronic layers by connecting the layers with optical connections. The fabrication process includes a first step of selectively exposing an adhesive bond whose adhesive strength changes by exposure, a second step of contacting the selectively-exposed adhesive bond with a thin-film device array on a first substrate, and a third step of selectively ring part of thin-film devices in the thin-film device array from the first substrate onto the selectively-exposed adhesive bond in accordance with an exposure pattern. |
| 公开日期 | 2008-06-17 |
| 申请日期 | 2002-07-25 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/36903]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | JSR CORPORATION |
| 推荐引用方式 GB/T 7714 | YOSHIMURA, TETSUZO,ARAI, YUKIHIKO. 3D optoelectronic micro system. US7387913. 2008-06-17. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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