Optical interposer
文献类型：专利
| 作者 | KOSENKO, VALENTIN; MCBAIN, EDWARD LEE; UZOH, CYPRIAN EMEKA; MONADGEMI, PEZHMAN; SAVASTIOUK, SERGEY |
| 发表日期 | 2014-06-24 |
| 专利号 | US8757897 |
| 著作权人 | INVENSAS CORPORATION |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Optical interposer |
| 英文摘要 | An optical interposer includes grooves (310) for optical fiber cables (104) coupled to a transducer (120). The grooves are formed by etching a cavity (410) in a substrate (130), filling the cavity with some layer (520), then etching the layer to form the grooves. The cavity has outwardly sloped sidewalls on which mirrors (144) are later formed. The groove etch is selective not to damage the sidewalls. The groove depth is uniform due to high etch selectivity of the layer, and also because of good control over the cavity etch due to the low aspect ratio of the cavity. Electrical circuitry for connection to the transducer is fabricated after the cavity filling but before the groove etch. The cavity filling leaves the wafer planar, facilitating fabrication of the electrical circuitry. Grooves can be provided on top and bottom of the interposer. Other features are also provided. |
| 公开日期 | 2014-06-24 |
| 申请日期 | 2012-01-31 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/37569]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | INVENSAS CORPORATION |
| 推荐引用方式 GB/T 7714 | KOSENKO, VALENTIN,MCBAIN, EDWARD LEE,UZOH, CYPRIAN EMEKA,et al. Optical interposer. US8757897. 2014-06-24. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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