Silicon photonics alignment tolerant vertical grating couplers
文献类型：专利
| 作者 | ELLIS-MONAGHAN, JOHN, J.; GREEN, WILLIAM, M., J.; HOFRICHTER, JENS; KHATER, MARWAN, H.; ROSENBERG, JESSIE, C.; SHANK, STEVEN, M. |
| 发表日期 | 2016-03-01 |
| 专利号 | US9274283 |
| 著作权人 | GLOBALFOUNDRIES INC. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Silicon photonics alignment tolerant vertical grating couplers |
| 英文摘要 | Disclosed are optoelectronic integrated circuit structures that incorporate a first optical waveguide, having a semiconductor core, indirectly coupled to a grating coupler through a second optical waveguide, having a dielectric core, in order provide a relatively large alignment tolerance. The dielectric core can comprise multiple dielectric layers above one end of the semiconductor core and extending laterally over an isolation region adjacent to that end. The grating coupler can include dielectric fins above the isolation region. Alternatively, the grating coupler can include semiconductor fins within the isolation region. Also disclosed herein are methods of forming such optoelectronic integrated circuit structures that can be readily integrated with complementary metal oxide semiconductor (CMOS) device processing and germanium photodetector processing. |
| 公开日期 | 2016-03-01 |
| 申请日期 | 2014-09-30 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/37779]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | GLOBALFOUNDRIES INC. |
| 推荐引用方式 GB/T 7714 | ELLIS-MONAGHAN, JOHN, J.,GREEN, WILLIAM, M., J.,HOFRICHTER, JENS,et al. Silicon photonics alignment tolerant vertical grating couplers. US9274283. 2016-03-01. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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