Micro heat transfer arrays, micro cold plates, and thermal management systems for cooling semiconductor devices, and methods for using and making such arrays, plates, and systems
文献类型:专利
作者 | CHEN, RICHARD T.; TAN, WILL J. |
发表日期 | 2018-04-24 |
专利号 | US9953899 |
著作权人 | MICROFABRICA INC. |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Micro heat transfer arrays, micro cold plates, and thermal management systems for cooling semiconductor devices, and methods for using and making such arrays, plates, and systems |
英文摘要 | Embodiments of the present invention are directed to heat transfer arrays, cold plates including heat transfer arrays along with inlets and outlets, and thermal management systems including cold-plates, pumps and heat exchangers. These devices and systems may be used to provide cooling of semiconductor devices and particularly such devices that produce high heat concentrations. The heat transfer arrays may include microjets, microchannels, fins, and even integrated microjets and fins. |
公开日期 | 2018-04-24 |
申请日期 | 2016-09-30 |
状态 | 授权 |
源URL | [http://ir.opt.ac.cn/handle/181661/37917] |
专题 | 半导体激光器专利数据库 |
作者单位 | MICROFABRICA INC. |
推荐引用方式 GB/T 7714 | CHEN, RICHARD T.,TAN, WILL J.. Micro heat transfer arrays, micro cold plates, and thermal management systems for cooling semiconductor devices, and methods for using and making such arrays, plates, and systems. US9953899. 2018-04-24. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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