Laser apparatus having condensation prevention function
文献类型:专利
作者 | TAKIGAWA, HIROSHI; NISHIO, AKIHIKO |
发表日期 | 2018-02-06 |
专利号 | US9887513 |
著作权人 | FANUC CORPORATION |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Laser apparatus having condensation prevention function |
英文摘要 | A laser apparatus that can reliably prevent the formation of condensation is disclosed. In the laser apparatus, the temperature of cooling water supplied into the interior of the laser apparatus is controlled within a first predetermined temperature range during laser oscillation, while at the same time, continuously performing dehumidification so that the relation (dew point of air inside laser apparatus)+(first predetermined temperature difference)≦(cooling water temperature) is maintained. The dew point of the air inside the laser apparatus can be obtained by a computing unit from the humidity and temperature of the air. |
公开日期 | 2018-02-06 |
申请日期 | 2016-12-02 |
状态 | 授权 |
源URL | [http://ir.opt.ac.cn/handle/181661/37940] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | FANUC CORPORATION |
推荐引用方式 GB/T 7714 | TAKIGAWA, HIROSHI,NISHIO, AKIHIKO. Laser apparatus having condensation prevention function. US9887513. 2018-02-06. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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