Method for fabricating fiducials for passive alignment of opto-electronic devices
文献类型：专利
| 作者 | BOWEN, TERRY PATRICK; RING, WILLIAM SEAN; JIANG, CHING-LONG; WILSON, RANDALL B.; SOLER, MARK S.; BREEDIS, JOHN BAKER; ANDERSON, RICHARD |
| 发表日期 | 2003-09-23 |
| 专利号 | US6625357 |
| 著作权人 | TYCO ELECTRONICS CORPORATION |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Method for fabricating fiducials for passive alignment of opto-electronic devices |
| 英文摘要 | The present invention relates to a technique for fabricating a mechanical or visual alignment fiducial on a laser die particularly adapted for application with a laser die that is a buried structure edge emitting laser. In fabricating the device, the fiducial and the active mesa are formed in the same photolithography patterning step, using conventional techniques. The active is then buried with regrowth layers. The regrowth layers are subsequently selectively etched to expose the fiducial, leaving the active region protected and buried. |
| 公开日期 | 2003-09-23 |
| 申请日期 | 2001-10-18 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/38117]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | TYCO ELECTRONICS CORPORATION |
| 推荐引用方式 GB/T 7714 | BOWEN, TERRY PATRICK,RING, WILLIAM SEAN,JIANG, CHING-LONG,et al. Method for fabricating fiducials for passive alignment of opto-electronic devices. US6625357. 2003-09-23. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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