中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Optical device having optical waveguide and method for manufacturing the same

文献类型:专利

作者OOHARA, JUNJI; YOSHIHARA, SHINJI; TAKEUCHI, YUKIHIRO
发表日期2007-02-06
专利号US7174072
著作权人DENSO CORPORATION
国家美国
文献子类授权发明
其他题名Optical device having optical waveguide and method for manufacturing the same
英文摘要An optical device includes: a silicon substrate; a plurality of silicon oxide columns having a rectangular plan shape; and a cavity disposed between the columns. Each column has a lower portion disposed on the substrate. Each column has a width defined as W The cavity has a width defined as W2. A ratio of W1/W2 becomes smaller as it goes to the lower portion of the column. A core layer provided by the columns and the cavity can have the thickness equal to or larger than a few dozen μm easily. Therefore, connection loss between a light source and the device is reduced.
公开日期2007-02-06
申请日期2005-05-31
状态授权
源URL[http://ir.opt.ac.cn/handle/181661/38259]  
专题半导体激光器专利数据库
作者单位DENSO CORPORATION
推荐引用方式
GB/T 7714
OOHARA, JUNJI,YOSHIHARA, SHINJI,TAKEUCHI, YUKIHIRO. Optical device having optical waveguide and method for manufacturing the same. US7174072. 2007-02-06.

入库方式: OAI收割

来源:西安光学精密机械研究所

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