Optical device having optical waveguide and method for manufacturing the same
文献类型:专利
作者 | OOHARA, JUNJI; YOSHIHARA, SHINJI; TAKEUCHI, YUKIHIRO |
发表日期 | 2007-02-06 |
专利号 | US7174072 |
著作权人 | DENSO CORPORATION |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Optical device having optical waveguide and method for manufacturing the same |
英文摘要 | An optical device includes: a silicon substrate; a plurality of silicon oxide columns having a rectangular plan shape; and a cavity disposed between the columns. Each column has a lower portion disposed on the substrate. Each column has a width defined as W The cavity has a width defined as W2. A ratio of W1/W2 becomes smaller as it goes to the lower portion of the column. A core layer provided by the columns and the cavity can have the thickness equal to or larger than a few dozen μm easily. Therefore, connection loss between a light source and the device is reduced. |
公开日期 | 2007-02-06 |
申请日期 | 2005-05-31 |
状态 | 授权 |
源URL | [http://ir.opt.ac.cn/handle/181661/38259] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | DENSO CORPORATION |
推荐引用方式 GB/T 7714 | OOHARA, JUNJI,YOSHIHARA, SHINJI,TAKEUCHI, YUKIHIRO. Optical device having optical waveguide and method for manufacturing the same. US7174072. 2007-02-06. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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