Semiconductor devices grown in spherical cavity arrays and its preparation method
文献类型：专利
| 作者 | WANG, BENZHONG; CHUA, SOO JIN |
| 发表日期 | 2010-10-12 |
| 专利号 | US7811846 |
| 著作权人 | AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Semiconductor devices grown in spherical cavity arrays and its preparation method |
| 英文摘要 | A method for fabricating an array of semiconductor devices comprising the steps of providing a non-metallic substrate, placing a layer of spheres on said substrate, reducing diameter of the spheres, encapsulating the spheres in a matrix of rigid material, finishing an upper surface of said matrix to expose a portion of said spheres, removing the spheres to form an array of cavities within said matrix, and forming features in said cavities in contact with said substrate so as to form the device. |
| 公开日期 | 2010-10-12 |
| 申请日期 | 2006-03-21 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/38297]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH |
| 推荐引用方式 GB/T 7714 | WANG, BENZHONG,CHUA, SOO JIN. Semiconductor devices grown in spherical cavity arrays and its preparation method. US7811846. 2010-10-12. |
入库方式： OAI收割
来源：西安光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。