Method of making semiconductor optical integrated device by alternately arranging spacers with integrated device arrays
文献类型：专利
| 作者 | YONEDA, YOSHIHIRO; KOBAYASHI, HIROHIKO; KOYAMA, KENJI; YANAGISAWA, MASAKI; HIRATSUKA, KENJI |
| 发表日期 | 2013-10-22 |
| 专利号 | US8563342 |
| 著作权人 | SUMITOMO ELECTRIC INDUSTRIES, LTD. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Method of making semiconductor optical integrated device by alternately arranging spacers with integrated device arrays |
| 英文摘要 | A method of making a semiconductor optical integrated device includes the steps of forming, on a substrate, a plurality of semiconductor integrated devices including a first optical semiconductor element having a first bonding pad and a second optical semiconductor element; forming a plurality of bar-shaped semiconductor optical integrated device arrays by cutting the substrate, each of the semiconductor optical integrated device arrays including two or more semiconductor optical integrated devices; alternately arranging the plurality of semiconductor optical integrated device arrays and a plurality of spacers in a thickness direction of the substrate so as to be fixed in place; and forming a coating film on a facet of the semiconductor optical integrated device array. Furthermore, the spacer has a movable portion facing the first bonding pad, the movable portion protruding toward the first bonding pad and being displaceable in a protruding direction. |
| 公开日期 | 2013-10-22 |
| 申请日期 | 2012-05-24 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/38601]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | SUMITOMO ELECTRIC INDUSTRIES, LTD. |
| 推荐引用方式 GB/T 7714 | YONEDA, YOSHIHIRO,KOBAYASHI, HIROHIKO,KOYAMA, KENJI,et al. Method of making semiconductor optical integrated device by alternately arranging spacers with integrated device arrays. US8563342. 2013-10-22. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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