Hybrid two-dimensional surface-emitting laser arrays
文献类型:专利
作者 | DONNELLY, JOSEPH P. |
发表日期 | 1989-11-14 |
专利号 | US4881237 |
著作权人 | MASSACHUSETTS INSTITUTE OF TECHNOLOGY, CAMBRIDGE, MA 02139 A CORP. OF MASSACHUSETTS |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Hybrid two-dimensional surface-emitting laser arrays |
英文摘要 | Two-dimensional surface-emitting diode laser arrays are described that take advantage of both the advanced state of development of linear laser arrays with conventional cleaved end faces and the rapid development of Si heat sink technology. A hybrid array consists of linear arrays of edge-emitting lasers that are mounted in grooves with flat bottoms and 45 DEG sidewalls etched in the top of a Si substrate containing microchannels for fluid flow on the backside. The 45 DEG sidewalls of the top Si grooves are coated with a highly reflecting metallic layer. These 45 DEG mirrors deflect the laser emission from the cleaved end faces of the linear laser arrays by 90 DEG so the emission is normal to the array surface. Use of the integral microchannel heat sink in the bottom of the Si substrate provides excellent heat removal capabilities for high power density operation. |
公开日期 | 1989-11-14 |
申请日期 | 1988-08-26 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/39055] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | MASSACHUSETTS INSTITUTE OF TECHNOLOGY, CAMBRIDGE, MA 02139 A CORP. OF MASSACHUSETTS |
推荐引用方式 GB/T 7714 | DONNELLY, JOSEPH P.. Hybrid two-dimensional surface-emitting laser arrays. US4881237. 1989-11-14. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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