中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Hybrid two-dimensional surface-emitting laser arrays

文献类型:专利

作者DONNELLY, JOSEPH P.
发表日期1989-11-14
专利号US4881237
著作权人MASSACHUSETTS INSTITUTE OF TECHNOLOGY, CAMBRIDGE, MA 02139 A CORP. OF MASSACHUSETTS
国家美国
文献子类授权发明
其他题名Hybrid two-dimensional surface-emitting laser arrays
英文摘要Two-dimensional surface-emitting diode laser arrays are described that take advantage of both the advanced state of development of linear laser arrays with conventional cleaved end faces and the rapid development of Si heat sink technology. A hybrid array consists of linear arrays of edge-emitting lasers that are mounted in grooves with flat bottoms and 45 DEG sidewalls etched in the top of a Si substrate containing microchannels for fluid flow on the backside. The 45 DEG sidewalls of the top Si grooves are coated with a highly reflecting metallic layer. These 45 DEG mirrors deflect the laser emission from the cleaved end faces of the linear laser arrays by 90 DEG so the emission is normal to the array surface. Use of the integral microchannel heat sink in the bottom of the Si substrate provides excellent heat removal capabilities for high power density operation.
公开日期1989-11-14
申请日期1988-08-26
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/39055]  
专题半导体激光器专利数据库
作者单位MASSACHUSETTS INSTITUTE OF TECHNOLOGY, CAMBRIDGE, MA 02139 A CORP. OF MASSACHUSETTS
推荐引用方式
GB/T 7714
DONNELLY, JOSEPH P.. Hybrid two-dimensional surface-emitting laser arrays. US4881237. 1989-11-14.

入库方式: OAI收割

来源:西安光学精密机械研究所

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