中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Family of discretely sized silicon nanoparticles and method for producing the same

文献类型:专利

作者NAYFEH, MUNIR H.; BELOMOIN, GENNADEY; RAO, SATISH; THERRIEN, JOEL; CHAIEB, SAHRAOUI
发表日期2004-06-01
专利号US6743406
著作权人BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS, THE
国家美国
文献子类授权发明
其他题名Family of discretely sized silicon nanoparticles and method for producing the same
英文摘要A family of discrete and uniformly sized silicon nanoparticles, including 1 (blue emitting), 67 (green emitting), 2.15 (yellow emitting), 2.9 (red emitting) and 3.7 nm (infrared emitting) nanoparticles, and a method that produces the family. The nanoparticles produced by the method of the invention are highly uniform in size. A very small percentage of significantly larger particles are produced, and such larger particles are easily filtered out. The method for producing the silicon nanoparticles of the invention utilizes a gradual advancing electrochemical etch of bulk silicon, e.g., a silicon wafer. The etch is conducted with use of an appropriate intermediate or low etch current density. An optimal current density for producing the family is ~10 milli Ampere per square centimeter (10 mA/cm<2>). Higher current density favors 1 nm particles, and lower the larger particles. Blue (1 nm) particles, if any appreciable quantity exist depending on the selected current density, may be removed by, for example, shaking or ultrasound. After the etch, the pulverized wafer is immersed in dilute HF for a short time, while the particles are still connected to the wafer to weaken the linkages between the larger particles. This may be followed by separation of nanoparticles from the surface of the silicon. Once separated, various methods may be employed to form plural nanoparticles into crystals, films and other desirable forms. The nanoparticles may also be coated or doped. The invention produces the family of a discrete set of sized particles and not a continuous size distribution. Particles may be isolated from the family, i.e., it is possible to produce any one of the sizes of particles from the family after the basic method steps have been executed to produce the family of particles.
公开日期2004-06-01
申请日期2001-11-21
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/39075]  
专题半导体激光器专利数据库
作者单位BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS, THE
推荐引用方式
GB/T 7714
NAYFEH, MUNIR H.,BELOMOIN, GENNADEY,RAO, SATISH,et al. Family of discretely sized silicon nanoparticles and method for producing the same. US6743406. 2004-06-01.

入库方式: OAI收割

来源:西安光学精密机械研究所

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