Two-dimensional phase-locked surface emitting semiconductor laser array
文献类型:专利
作者 | DEFREEZ, RICHARD K.; ELLIOTT, RICHARD A.; PURETZ, JOSEPH |
发表日期 | 1989-01-03 |
专利号 | US4796269 |
著作权人 | OREGON GRADUATE CENTER, A CORP. OF OR |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Two-dimensional phase-locked surface emitting semiconductor laser array |
英文摘要 | A coherent, two-dimensional, phase-locked, surface emitting semiconductor laser array in a monolithic wafer is disclosed. Active regions of diode laser-striped semiconductor material are focused ion beam (FIB) micromachined to form transversely disposed channels of symmetric, opposed, generally parabolic, mirrored surfaces. Multiple diode laser pairs, emitting laser energy in a generally horizontal plane, are longitudinally injection-coupled (phase-locked) by semitransmissive, opposed regions that are micromachined into the otherwise reflective parabolic surfaces of each channel. Inherently, the striped material permits evanescent coupling, in an axis generally perpendicular to the longitudinal, injection-coupled axis. Thus, coupling is achieved in two dimensions across the extent of the array. High-power, coherent, laser energy is reflected thereby generally normally away from the surface of the monolithic structure. In a modification to the preferred embodiment, discrete electrodes on the top surface of the active region segments enable laser beam modulation or wavelength tuning of the coherent, surface emitting laser energy. |
公开日期 | 1989-01-03 |
申请日期 | 1987-05-22 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/39228] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | OREGON GRADUATE CENTER, A CORP. OF OR |
推荐引用方式 GB/T 7714 | DEFREEZ, RICHARD K.,ELLIOTT, RICHARD A.,PURETZ, JOSEPH. Two-dimensional phase-locked surface emitting semiconductor laser array. US4796269. 1989-01-03. |
入库方式: OAI收割
来源:西安光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。