Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy
文献类型：专利
| 作者 | HOU, HONG Q.; COLTRIN, MICHAEL E.; CHOQUETTE, KENT D. |
| 发表日期 | 2001-07-10 |
| 专利号 | US6258615 |
| 著作权人 | NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy |
| 英文摘要 | A process for forming an array of vertical cavity optical resonant structures wherein the structures in the array have different detection or emission wavelengths. The process uses selective area growth (SAG) in conjunction with annular masks of differing dimensions to control the thickness and chemical composition of the materials in the optical cavities in conjunction with a metalorganic vapor phase epitaxy (MOVPE) process to build these arrays. |
| 公开日期 | 2001-07-10 |
| 申请日期 | 1998-11-12 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/39730]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC |
| 推荐引用方式 GB/T 7714 | HOU, HONG Q.,COLTRIN, MICHAEL E.,CHOQUETTE, KENT D.. Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy. US6258615. 2001-07-10. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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