Chemical treatment plasma apparatus for forming a ribbon-like plasma
文献类型：专利
| 作者 | CHOUAN, YANNICK; LE CONTELLEC, MICHEL; MORIN, FRANCOIS; SAADA, SERGE |
| 发表日期 | 1994-07-12 |
| 专利号 | US5328515 |
| 著作权人 | FRANCE TELECOM ETABLISSEMENT AUTONOME DE DROIT PUBLIC |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Chemical treatment plasma apparatus for forming a ribbon-like plasma |
| 英文摘要 | The apparatus incorporates a h.f. source (2), a plasma enclosure ( 4 ) having gas supplies, a vacuum pump (50), elements for coupling the source to the plasma enclosure, which is of a non-radiating type and which is shaped like a rectangular parallelepiped with first and second dielectric material faces parallel to the direction of the magnetic field and a third face having a rectangular opening (14) parallel to said field for forming a ribbon-like plasma, a treatment enclosure containing a mobile sample holder (18) communicating via the opening with the plasma enclosure. The coupling means have two linear waveguides (30, 38 ) with a rectangular cross-section oriented in the wave propagation direction and located on either side of the plasma enclosure, a horn (36) for coupling one of the guides to the plasma enclosure, whose cross-section widens in the magnetic field direction, the other guide being provided with a short-circuit (46). |
| 公开日期 | 1994-07-12 |
| 申请日期 | 1993-05-03 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/40110]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | FRANCE TELECOM ETABLISSEMENT AUTONOME DE DROIT PUBLIC |
| 推荐引用方式 GB/T 7714 | CHOUAN, YANNICK,LE CONTELLEC, MICHEL,MORIN, FRANCOIS,et al. Chemical treatment plasma apparatus for forming a ribbon-like plasma. US5328515. 1994-07-12. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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