Micromirror for a hybrid optoelectronic integrated circuit, a method for manufacturing the same, a micromirror-photodetector assembly and an assembly of hybrid optoelectronic integrated circuit for receiving light
文献类型：专利
| 作者 | LEE, SANG HWAN; HWANG, NAM; SONG, MIN KYU; LEE, HEE TAE; PYUN, KWANG EUI |
| 发表日期 | 1999-10-26 |
| 专利号 | US5972232 |
| 著作权人 | ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Micromirror for a hybrid optoelectronic integrated circuit, a method for manufacturing the same, a micromirror-photodetector assembly and an assembly of hybrid optoelectronic integrated circuit for receiving light |
| 英文摘要 | Disclosed is a micromirror for a hybrid optoelectronic integrated circuit, a method for manufacturing the same, a micromirror-photodetector assembly and an assembly of hybrid optoelectronic integrated circuit for receiving light. The micromirror the present invention comprises a silicon substrate and at least one V-shaped groove formed in the silicon substrate and the V-shaped groove has an inclined surface reflecting light emitted from an optical waveguide to a photodetector. The alignment of the photodetector and the optical fibers is achieved without an additional attachment equipment, by inserting the optical fibers into the V-groove. |
| 公开日期 | 1999-10-26 |
| 申请日期 | 1997-12-03 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/40124]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
| 推荐引用方式 GB/T 7714 | LEE, SANG HWAN,HWANG, NAM,SONG, MIN KYU,et al. Micromirror for a hybrid optoelectronic integrated circuit, a method for manufacturing the same, a micromirror-photodetector assembly and an assembly of hybrid optoelectronic integrated circuit for receiving light. US5972232. 1999-10-26. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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