中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor substrate made of a nitride III-V compound semiconductor having a wurtzite-structured crystal structure

文献类型:专利

作者MORITA, ETSUO; IKEDA, MASAO; KAWAI, HIROJI
发表日期2002-12-31
专利号US6501154
著作权人SONY CORPORATION
国家美国
文献子类授权发明
其他题名Semiconductor substrate made of a nitride III-V compound semiconductor having a wurtzite-structured crystal structure
英文摘要There are provided a semiconductor substrate and a semiconductor laser using the semiconductor substrate which promises smooth and optically excellent cleaved surfaces and is suitable for fabricating semiconductor lasers using nitride III-V compound semiconductors. Using a semiconductor substrate, such as GaN substrate, having a major surface substantially normal to a {0001}-oriented face, e.g. {01-10}-oriented face or {11-20}-oriented face, or offset within ±5° from these faces, nitride III-V compound semiconductor layers are epitaxially grown on the substrate to form a laser structure. To make cavity edges, the GaN substrate is cleaved together with the overlying III-V compound semiconductor layers along high-cleavable {0001}-oriented faces.
公开日期2002-12-31
申请日期1998-06-02
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/41657]  
专题半导体激光器专利数据库
作者单位SONY CORPORATION
推荐引用方式
GB/T 7714
MORITA, ETSUO,IKEDA, MASAO,KAWAI, HIROJI. Semiconductor substrate made of a nitride III-V compound semiconductor having a wurtzite-structured crystal structure. US6501154. 2002-12-31.

入库方式: OAI收割

来源:西安光学精密机械研究所

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