Distributed feedback laser having enhanced etch stop features
文献类型:专利
作者 | VERMA, ASHISH K.; SUDO, TSURUGI; THIYAGARAJAN, SUMESH MANI K.; YOUNG, DAVID BRUCE |
发表日期 | 2013-07-02 |
专利号 | US8477817 |
著作权人 | FINISAR CORPORATION |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Distributed feedback laser having enhanced etch stop features |
英文摘要 | In one example embodiment, a DFB laser includes a substrate, an active region positioned above the substrate, and a grating layer positioned above the active region. The grating layer includes a portion that serves as a primary etch stop layer. The DFB laser also includes a secondary etch stop layer located either above or below the grating layer, and a spacer layer interposed between the grating layer and the active region. |
公开日期 | 2013-07-02 |
申请日期 | 2010-10-11 |
状态 | 授权 |
源URL | [http://ir.opt.ac.cn/handle/181661/41678] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | FINISAR CORPORATION |
推荐引用方式 GB/T 7714 | VERMA, ASHISH K.,SUDO, TSURUGI,THIYAGARAJAN, SUMESH MANI K.,et al. Distributed feedback laser having enhanced etch stop features. US8477817. 2013-07-02. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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