Dielectric optical waveguides and technique for fabricating same
文献类型：专利
| 作者 | LOGAN, RALPH ANDRE; SCHWARTZ, BERTRAM; TRACY, JR., JOSEPH CHARLES; WIEGMANN, WILLIAM |
| 发表日期 | 1975-02-11 |
| 专利号 | US3865646 |
| 著作权人 | BELL TELEPHONE LABORATORIES, INCORPORATED |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Dielectric optical waveguides and technique for fabricating same |
| 英文摘要 | A method of fabricating dielectric optical waveguides comprises the steps of: (1) fabricating a single or double heterostructure from the GaAs-AlGaAs system preferably by liquid phase epitaxy or molecular beam epitaxy; (2) forming a native oxide layer on the top surface of the heterostructure by anodization in H.sub.2 O.sub.2 ; (3) removing a portion of the oxide layer to form a mask and hence to define the waveguide shape in the direction of light propagation; and (4) forming a mesa-like structure with optically flat side walls by etching at a slow rate in Br.sub.2 --CH.sub.3 OH. After step (4) two alternative techniques leading to structurally different waveguides may be followed. In one technique, an AlGaAs layer is epitaxially grown over the mesa to form a two dimensional waveguide. In the other technique, the edges of the active region of an AlGaAs double heterostructure are differentially etched in a neutral solution of H.sub.2 O.sub.2. The latter step is particularly useful in the fabrication of active devices because the resulting structure is self-masking, thereby facilitating the formation of electrical contacts. |
| 公开日期 | 1975-02-11 |
| 申请日期 | 1973-12-26 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/41861]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | BELL TELEPHONE LABORATORIES, INCORPORATED |
| 推荐引用方式 GB/T 7714 | LOGAN, RALPH ANDRE,SCHWARTZ, BERTRAM,TRACY, JR., JOSEPH CHARLES,et al. Dielectric optical waveguides and technique for fabricating same. US3865646. 1975-02-11. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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