Optical semiconductor device having diffraction grating
文献类型:专利
作者 | HATORI, NOBUAKI; YAMAMOTO, TSUYOSHI; ARAKAWA, YASUHIKO |
发表日期 | 2010-06-15 |
专利号 | US7738523 |
著作权人 | FUJITSU LIMITED |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Optical semiconductor device having diffraction grating |
英文摘要 | An optical semiconductor device includes: a waveguide structure including layers grown over a semiconductor substrate, having a width defined by sidewalls formed by etching the layers, and including a wide, a narrow, and an intermediate width portion, formed along a propagation direction; and a diffraction grating formed on the sidewalls of at least one of the wide and narrow width portions of the waveguide structure, the diffraction grating having vertical grooves periodically disposed along the propagation direction and defining a wavelength of propagation light, wherein the narrow width portion is formed in such a manner that a loss of 50% or more is given to a higher order transverse mode. An optical semiconductor device having a vertical diffraction grating is provided which can suppress generation of a higher order transverse mode and an increase in a device resistance. |
公开日期 | 2010-06-15 |
申请日期 | 2007-03-09 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/41896] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | FUJITSU LIMITED |
推荐引用方式 GB/T 7714 | HATORI, NOBUAKI,YAMAMOTO, TSUYOSHI,ARAKAWA, YASUHIKO. Optical semiconductor device having diffraction grating. US7738523. 2010-06-15. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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