Vertical cavity surface emitting devices incorporating wafer fused reflectors
文献类型:专利
作者 | SIRBU, ALEXEI; MEREUTA, ALEXANDRU; CALIMAN, ANDREI |
发表日期 | 2014-02-18 |
专利号 | US8652936 |
著作权人 | ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Vertical cavity surface emitting devices incorporating wafer fused reflectors |
英文摘要 | A method of forming an optoelectronic device comprising growing a first multi-layer 2 representing a reflector on a first substrate and a second multilayer 4 representing an active region on a second substrate, the first and second substrates being lattice mismatched, fusing the first multi-layer 2 to a third substrate 3, wherein the material of the third substrate 3 is lattice matched with respect to the material of the second multi-layer 4, removing the first substrate to expose the first multi-layer 2, and fusing the first multi-layer to the second multi-layer 4. |
公开日期 | 2014-02-18 |
申请日期 | 2010-07-01 |
状态 | 授权 |
源URL | [http://ir.opt.ac.cn/handle/181661/42038] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE |
推荐引用方式 GB/T 7714 | SIRBU, ALEXEI,MEREUTA, ALEXANDRU,CALIMAN, ANDREI. Vertical cavity surface emitting devices incorporating wafer fused reflectors. US8652936. 2014-02-18. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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