Method of manufacturing frequency tunable terahertz transceiver
文献类型：专利
| 作者 | PARK, KYUNG, HYUN |
| 发表日期 | 2016-01-12 |
| 专利号 | US9236711 |
| 著作权人 | ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Method of manufacturing frequency tunable terahertz transceiver |
| 英文摘要 | A method of manufacturing a frequency tunable terahertz transceiver including two separate distributed feedback lasers manufactured in one substrate, includes forming a lower clad layer on the substrate, forming an active layer on the lower clad layer, forming an upper clad layer on the active layer. And interposing first and second diffraction grating layers between the upper clad layers. A diffraction grating is manufactured by etching the first and second diffraction grating layers. The active layer is integrated into a passive waveguide. An electrode is formed on the upper clad layer. |
| 公开日期 | 2016-01-12 |
| 申请日期 | 2014-02-10 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/42104]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
| 推荐引用方式 GB/T 7714 | PARK, KYUNG, HYUN. Method of manufacturing frequency tunable terahertz transceiver. US9236711. 2016-01-12. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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