中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
半導体レ-ザ素子

文献类型:专利

作者清水 明
发表日期1995-03-29
专利号JP1995028093B2
著作权人キヤノン株式会社
国家日本
文献子类授权发明
其他题名半導体レ-ザ素子
英文摘要PURPOSE:To obtain a variable wavelength semiconductor laser element, which has a broad variable wavelength range and is operated at high efficiency, by providing a plurality of light emitting layers with different oscillating wavelengths in the same light guide structure. CONSTITUTION:On an N-type GaAs substrate 1, N-type GaAs is grown by 1mum as a buffer layer 2, and N-type Al0.7Ga0.3As is grown by a thickness of 2mum as a clad layer 5. Then, a barrier layer 92, a first light emitting layer 10, a barrier layer 11, a second light emitting layer 12 and a barrier layer 91 are sequentially grown on the clad layer 5. Then, parts of a cap layer 6 and a clad layer 3 are etched to the vicinity of the barrier layer 91, and a stripe shaped protruding region is formed. Then the surface is masked with a dielectric layer. An electrode 8 is evaporated so as to contact with only the upper part of the cap layer 6, which is not etched. An electrode 7 is further evaporated on the bottom surface of the substrate The laminated bodies are cleaved, and an element having a laser resonance surface is formed. Thus the variable wavelength range of the semiconductor laser element can be made wide, and the light emitting efficiency can be enhanced.
公开日期1995-03-29
申请日期1987-02-27
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/42137]  
专题半导体激光器专利数据库
作者单位キヤノン株式会社
推荐引用方式
GB/T 7714
清水 明. 半導体レ-ザ素子. JP1995028093B2. 1995-03-29.

入库方式: OAI收割

来源:西安光学精密机械研究所

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