中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Method for fabricating a semiconductor laser device

文献类型:专利

作者KOKUBO, YOSHIHIRO; SUSAKI, WATARU
发表日期1988-02-16
专利号US4725450
著作权人MITSUBISHI DENKI KABUSHIKI KAISHA
国家美国
文献子类授权发明
其他题名Method for fabricating a semiconductor laser device
英文摘要A semiconductor laser device is fabricated by forming a first semiconductor layer of N type GaAs to be a current narrowing layer on a P type GaAs semiconductor substrate, forming a second semiconductor layer of P type AlGaAs on the first semiconductor layer, removing said second semiconductor layer by etching except the proximity of the portion to be the end surface of a resonator, forming a striped groove which is deep enough to penetrate the first semiconductor layer and extends to that direction which crosses the surface to be the end surface of the resonator and, depositing a lower clad layer, an active layer, an upper layer and a contact layer in this order.
公开日期1988-02-16
申请日期1987-02-27
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/42227]  
专题半导体激光器专利数据库
作者单位MITSUBISHI DENKI KABUSHIKI KAISHA
推荐引用方式
GB/T 7714
KOKUBO, YOSHIHIRO,SUSAKI, WATARU. Method for fabricating a semiconductor laser device. US4725450. 1988-02-16.

入库方式: OAI收割

来源:西安光学精密机械研究所

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