中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
面発光型半導体レーザーの製造方法

文献类型:专利

作者伊賀 健一; 古沢 浩太郎; 茨木 晃
发表日期1997-11-21
专利号JP2719631B2
著作权人科学技術振興事業団
国家日本
文献子类授权发明
其他题名面発光型半導体レーザーの製造方法
英文摘要PURPOSE:To improve current entrapment effect by providing a current block layer around an activation layer performing crystal growth for two times. CONSTITUTION:An n-Ga0.6Al0.4As clad layer 2 and a p-GaAs activation layer 11 are allowed to grow in sequence on an n-GaAs substrate 1 by the first growth. Then, a mesa of 5mumphi and a height up to 2.0mum is formed on the p-GaAs activation layer 1 Then, after allowing an n-Ga0.6Al0.4As block layer 12 to grow on the p-GaAs activation layer 11 including the mesa utilizing the characteristics of the LPE method, the thin n-Ga0.6Al0.4As block layer 12 on the mesa of the n-GaAs activation layer 11 is removed, and then a p-Ga0.6Al0.4As clad layer 7 and a p-Ga0.85Al0.15As cap layer 8 are allowed to grow. Finally, one part of the n-GaAs substrate 1 is removed until the n-Ga0.6Al0.4As clad layer 2 is exposed, a reflection mirror 9a and a reflection mirror 9b on a cap layer 8 are provided, and then electrodes 10a, 10a and 10b, 10b are provided to allow a surface-emission type semiconductor to be formed.
公开日期1998-02-25
申请日期1988-08-17
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/42228]  
专题半导体激光器专利数据库
作者单位科学技術振興事業団
推荐引用方式
GB/T 7714
伊賀 健一,古沢 浩太郎,茨木 晃. 面発光型半導体レーザーの製造方法. JP2719631B2. 1997-11-21.

入库方式: OAI收割

来源:西安光学精密机械研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。