光導波路形成法
文献类型：专利
| 作者 | 加藤 和利; 秦 進; 吉田 淳一 |
| 发表日期 | 2000-01-07 |
| 专利号 | JP3019271B2 |
| 著作权人 | 日本電信電話株式会社 |
| 国家 | 日本 |
| 文献子类 | 授权发明 |
| 其他题名 | 光導波路形成法 |
| 英文摘要 | PURPOSE:To enhance the efficiency of optical coupling between elements by tapering not only the width but thickness as well of the optical waveguide formed on a semiconductor or dielectric substrate as compared with the conventional waveguides tapered only in the width relating to the method for forming the above-mentioned optical waveguide. CONSTITUTION:The method for forming the tapered optical waveguide on the semiconductor or dielectric substrate includes a 1st stage for laminating a 1st clad layer 2 consisting of a 1st material and a core layer 3 consisting of a 2nd material on the semiconductor or dielectric substrate 1, a 2nd stage for working at least the core layer 3 of the above-mentioned 1st clad layer 2 and core layer 3 by selective etching to the same tapered and ridge shape 30 as the shape of a mask 4 having the tapered shape by using this mask 4, a 3rd stage for non-selectively etching the tapered ridge-shaped core layer 30 after removal of the etching mask 4, and a 4th stage for laminating a 2nd clad layer 5 consisting of a 3rd material on the 1st clad layer 2 and the core layer 30. |
| 公开日期 | 2000-03-13 |
| 申请日期 | 1991-04-05 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/42240]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | 日本電信電話株式会社 |
| 推荐引用方式 GB/T 7714 | 加藤 和利,秦 進,吉田 淳一. 光導波路形成法. JP3019271B2. 2000-01-07. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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