Focused ion beam formation of angled optoelectronic devices
文献类型：专利
| 作者 | CHAKRABARTI, UTPAL KUMAR; PEALE, DAVID REESE |
| 发表日期 | 2001-04-10 |
| 专利号 | US6214178 |
| 著作权人 | LUCENT TECHNOLOGIES INC. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Focused ion beam formation of angled optoelectronic devices |
| 英文摘要 | Fabrication of an optoelectronic device is enhanced by using a focused ion beam to prepare one or more of the device's facet surfaces. In particular, a facet may be oriented at a nearly arbitrary angled with respect to the waveguide within the device by controlling the orientation between the focused ion beam source and the device waveguide. Such facets are useful as antireflection and refractive beamsteering surfaces. |
| 公开日期 | 2001-04-10 |
| 申请日期 | 1998-12-22 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/42278]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | LUCENT TECHNOLOGIES INC. |
| 推荐引用方式 GB/T 7714 | CHAKRABARTI, UTPAL KUMAR,PEALE, DAVID REESE. Focused ion beam formation of angled optoelectronic devices. US6214178. 2001-04-10. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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