Semiconductor structure with flared mesa burying layers
文献类型：专利
| 作者 | NELSON, ANDREW W.; HOBBS, RICHARD E.; DEVLIN, W. JOHN; LENTON, CHARLES G. |
| 发表日期 | 1990-06-19 |
| 专利号 | US4935936 |
| 著作权人 | BRITISH TELECOMMUNICATIONS PLC |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Semiconductor structure with flared mesa burying layers |
| 英文摘要 | A semiconductor structure and methods for making it, for use in opto-electronic devices, employs only MOVPE growth steps. The structure is based on a mesa having substantially non-reentrant sides. To make it, an initial semiconductor structure is produced which comprises a substrate with a mesa thereon, the mesa having a self-aligned, central stripe of metal organic vapour phase growth suppressing material on its uppermost surface. Burying layers are then grown by MOVPE at either side of the mesa, the stripe removed, and covering layers grown over the mesa and adjoining regions of the burying layers. To make an opto-electronic device, a silica window can be formed on the uppermost surface of the covering layers and contacts provided through the window and to the remote face of the substrate. Two methods of making the initial semiconductor structure are described. Devices such as optical detectors and waveguides can be made using methods according to the invention. Particularly importantly, semiconductor lasers which will operate in a single transverse mode can be made. |
| 公开日期 | 1990-06-19 |
| 申请日期 | 1989-02-22 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/42399]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | BRITISH TELECOMMUNICATIONS PLC |
| 推荐引用方式 GB/T 7714 | NELSON, ANDREW W.,HOBBS, RICHARD E.,DEVLIN, W. JOHN,et al. Semiconductor structure with flared mesa burying layers. US4935936. 1990-06-19. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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