Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom
文献类型：专利
| 作者 | CARR, DUSTIN WADE; BOGART, GREGORY ROBERT; KEELER, BIANCA E. N. |
| 发表日期 | 2008-03-04 |
| 专利号 | US7339738 |
| 著作权人 | NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom |
| 英文摘要 | A nanomechanical near-field grating device is disclosed which includes two sub-gratings vertically spaced by a distance less than or equal to an operating wavelength. Each sub-grating includes a plurality of line-elements spaced apart by a distance less than or equal to the operating wavelength. A light source (e.g., a VCSEL or LED) can provide light at the operating wavelength for operation of the device. The device can operate as an active grating, with the intensity of a reflected or transmitted portion of the light varying as the relative positions of the sub-gratings are controlled by an actuator. The device can also operate as a passive grating, with the relative positions of the sub-gratings changing in response to an environmentally-induced force due to acceleration, impact, shock, vibration, gravity, etc. Since the device can be adapted to sense an acceleration that is directed laterally or vertically, a plurality of devices can be located on a common substrate to form a multi-axis acceleration sensor. |
| 公开日期 | 2008-03-04 |
| 申请日期 | 2005-03-23 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/42532]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC |
| 推荐引用方式 GB/T 7714 | CARR, DUSTIN WADE,BOGART, GREGORY ROBERT,KEELER, BIANCA E. N.. Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom. US7339738. 2008-03-04. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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