Vertical cavity surface emitting laser and sensor
文献类型：专利
| 作者 | SHIEH, CHAN-LONG; ACKLEY, DONALD E. |
| 发表日期 | 1994-07-19 |
| 专利号 | US5331658 |
| 著作权人 | SEIKO EPSON CORPORATION |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Vertical cavity surface emitting laser and sensor |
| 英文摘要 | A vertical cavity surface emitting laser (VCSEL) having sensing capabilities is fabricated by forming a layer having the capability to change the threshold current of the VCSEL. This can be accomplished by forming a deformable membrane or a cantilevered beam on the VCSEL. The deformation of movement of the beam causes a change in the threshold current of the VCSEL, so that it can go from lasing to nonlasing or vice versa. In addition, a layer which changes reflectivity in the presence of a particular chemical can also be formed on the VCSEL to produce the same result. |
| 公开日期 | 1994-07-19 |
| 申请日期 | 1992-08-26 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/42612]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | SEIKO EPSON CORPORATION |
| 推荐引用方式 GB/T 7714 | SHIEH, CHAN-LONG,ACKLEY, DONALD E.. Vertical cavity surface emitting laser and sensor. US5331658. 1994-07-19. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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