中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Method for p-doping of a light-emitting device

文献类型:专利

作者GRODZINSKI, PIOTR; LEE, HSING-CHUNG; SHIEH, CHAN-LONG
发表日期1996-08-20
专利号US5547898
著作权人MOTOROLA
国家美国
文献子类授权发明
其他题名Method for p-doping of a light-emitting device
英文摘要A method for controlling carbon doping levels in a Distributed Bragg Reflectors (DBRs) for a Vertical Cavity Surface Emitting Laser (VCSELs) devices is provided. A first stack of mirrors (105) is deposited on the surface (101) of the substrate (102). A first cladding region (106) is deposited on the first stack of mirrors (105). An active layer (108) is deposited on the first cladding layer (106). A second cladding layer (109) is deposited on the active layer (108). A second stack of mirrors (111) is deposited on the second cladding layer (109) having a carbon doping level controlled by ratio of Group V containing organometallic (tertiarybutylarsine) to Group III organometallics (trimethylgallium and trimethylaluminum).
公开日期1996-08-20
申请日期1995-09-18
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/43152]  
专题半导体激光器专利数据库
作者单位MOTOROLA
推荐引用方式
GB/T 7714
GRODZINSKI, PIOTR,LEE, HSING-CHUNG,SHIEH, CHAN-LONG. Method for p-doping of a light-emitting device. US5547898. 1996-08-20.

入库方式: OAI收割

来源:西安光学精密机械研究所

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