Method of making non-planar micro-optical structures
文献类型:专利
作者 | PEAKE, GREGORY M.; HERSEE, STEPHEN D.; SARANGAN, ANDREW M. |
发表日期 | 2002-04-02 |
专利号 | US6365237 |
著作权人 | UNIVERSITY OF NEW MEXICO |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Method of making non-planar micro-optical structures |
英文摘要 | In one embodiment, the present invention provides a microlens having very small focal length. The present invention also provides a non-planar microstructure having a covering layer which is slowly oxidizing or substantially free of oxygen. The present invention also provides methods for forming such microlenses and microstructures. In addition, the present invention provides a VCSEL which includes one or more non-planar microstructures of the present invention. |
公开日期 | 2002-04-02 |
申请日期 | 2000-07-24 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/43199] |
专题 | 半导体激光器专利数据库 |
作者单位 | UNIVERSITY OF NEW MEXICO |
推荐引用方式 GB/T 7714 | PEAKE, GREGORY M.,HERSEE, STEPHEN D.,SARANGAN, ANDREW M.. Method of making non-planar micro-optical structures. US6365237. 2002-04-02. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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