Flexural contact in MEMS stiction
文献类型：期刊论文
| 作者 | Zhang, Yin ; Zhao, Ya-pu; Zhang, Y
|
| 刊名 | INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES
 |
| 出版日期 | 2012-09-01 |
| 卷号 | 49期号:17页码:2203-2214 |
| 通讯作者邮箱 | zhangyin@lnm.imech.ac.cn |
| 关键词 | Stiction Contact mechanics MEMS Adhesion Arc-shape S-shape |
| ISSN号 | 0020-7683 |
| 产权排序 | [Zhang, Yin;Zhao, Ya-pu] Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China |
| 通讯作者 | Zhang, Y ; Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China. |
| 中文摘要 | Adhesive force between two solid surfaces can lead to stiction failure of the micro-electro-mechanical systems (MEMS) device. The competition between the adhesive force and the beam restoring force determines whether the stiction occurs or not. Previous models assume that the stuck beam deforms either as the arc-shape or the S-shape, which causes significant differences in the measurements of adhesion and disputations among researchers. The contact mechanics model presented in this paper shows that the assumptions of the arc-shape and S-shape on the beam deformation over-simplify the problem;both the arc-shaped deformation and S-shaped deformation significantly deviate from the real ones. The previous theories are shown to be incompatible with the recent experimental results. The model presented in this paper attempts to explain those new experimental results and resolve some disputations on the previous models. The instabilities of jump-in during loading process and jump-off during unloading process are also incorporated in this model. |
| 英文摘要 | Adhesive force between two solid surfaces can lead to stiction failure of the micro-electro-mechanical systems (MEMS) device. The competition between the adhesive force and the beam restoring force determines whether the stiction occurs or not. Previous models assume that the stuck beam deforms either as the arc-shape or the S-shape, which causes significant differences in the measurements of adhesion and disputations among researchers. The contact mechanics model presented in this paper shows that the assumptions of the arc-shape and S-shape on the beam deformation over-simplify the problem; both the arc-shaped deformation and S-shaped deformation significantly deviate from the real ones. The previous theories are shown to be incompatible with the recent experimental results. The model presented in this paper attempts to explain those new experimental results and resolve some disputations on the previous models. The instabilities of jump-in during loading process and jump-off during unloading process are also incorporated in this model. (C) 2012 Elsevier Ltd. All rights reserved. |
| 学科主题 | 微机电系统中的固体力学问题 |
| 分类号 | 一类/力学重要期刊 |
| 类目[WOS] | Mechanics |
| 研究领域[WOS] | Mechanics |
| 关键词[WOS] | UNBONDED CONTACT ; STATIC FRICTION ; FINITE BEAM ; ADHESION ; MODEL ; MICROCANTILEVERS ; MECHANICS ; SURFACES ; FORCE ; TRANSITIONS |
| 收录类别 | SCI |
| 资助信息 | The research has been supported by the National Natural Science Foundation of China (NSFC Nos. 11021262 and 11023001) and Chinese Academy of Sciences (Grant No. KJCX2-EW-L03). |
| 原文出处 | http://dx.doi.org/10.1016/j.ijsolstr.2012.03.032 |
| 语种 | 英语 |
| WOS记录号 | WOS:000306206600001 |
| 公开日期 | 2013-01-18 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/46694]  |
| 专题 | 力学研究所_非线性力学国家重点实验室 |
| 通讯作者 | Zhang, Y |
| 作者单位 | Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Yin,Zhao, Ya-pu,Zhang, Y. Flexural contact in MEMS stiction[J]. INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES,2012,49(17):2203-2214. |
| APA | Zhang, Yin,Zhao, Ya-pu,&Zhang, Y.(2012).Flexural contact in MEMS stiction.INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES,49(17),2203-2214. |
| MLA | Zhang, Yin,et al."Flexural contact in MEMS stiction".INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES 49.17(2012):2203-2214. |
入库方式： OAI收割
来源：力学研究所
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