Characterization of Cr doped diamond-like carbon films and research on mechanical properties
文献类型：会议论文
| 作者 | Fan YY(范有余) ; Li G(李光); Xia Y(夏原)
|
| 出版日期 | 2013 |
| 会议名称 | International Conference on Materials Science and Nanotechnology (ICMSN 2012) |
| 会议日期 | NOV 16-18, 2012 |
| 会议地点 | Guangzhou, PEOPLES R CHINA |
| 通讯作者邮箱 | fanyouyu@imech.ac.cn |
| 关键词 | Cr-DLC films Internal stress Nanohardness X ray photoelectron spectroscopy |
| 卷号 | 531-532 |
| 页码 | 523-526 |
| 通讯作者 | Fan, YY (reprint author), Chinese Acad Sci, Inst Mech, Beijing 100190, Peoples R China. |
| 中文摘要 | Diamond-like carbon (DLC) films have been extensively studied for more than a decade due to their unique combination of properties. The internal compressive stress affects their adhesion and preventing wide usage of these films. Metal-containing DLC films are expected to relax internal stress. The present work focused on the synthesis, chemical bond and mechanical property characterization of Cr-containing DLC films. The films thickness, internal stress and composition were characterized by scanning electron microscopy, optical interferometry and X-ray photoelectron spectroscopy respectively. Incorporation of Cr into DLC causes an initial internal stress reduction and subsequent stabilization around 0.5 GPa. The hardness behavior was found to depend on Cr content. Films with less than 7.36 at.% Cr (no formation of C-Cr bond) showed a dramatically hardness reduction compared to pure DLC films. Above 7.36 at.% Cr (C-Cr bond formed) the hardness increases above 12 GPa. |
| 收录类别 | CPCI-S ; EI |
| 产权排序 | 1 Institute of Mechanics, Chinese Academy of Sciences, Beijing 100190, China; 2 Graduate University of Chinese Academy of Sciences, Beijing, 100049, China |
| 会议网址 | http://dx.doi.org/10.4028/www.scientific.net/KEM.531-532.523 |
| 会议录 | MATERIALS SCIENCE AND NANOTECHNOLOGY I
 |
| 会议录出版者 | TRANS TECH PUBLICATIONS LTD |
| 语种 | 英语 |
| ISSN号 | 1013-9826 |
| ISBN号 | 978-3-03785-525-6 |
| WOS记录号 | WOS:000316642300115 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/46845]  |
| 专题 | 力学研究所_先进制造工艺力学重点实验室 |
| 推荐引用方式 GB/T 7714 | Fan YY,Li G,Xia Y. Characterization of Cr doped diamond-like carbon films and research on mechanical properties[C]. 见:International Conference on Materials Science and Nanotechnology (ICMSN 2012). Guangzhou, PEOPLES R CHINA. NOV 16-18, 2012.http://dx.doi.org/10.4028/www.scientific.net/KEM.531-532.523. |
入库方式： OAI收割
来源：力学研究所
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