Molecular dynamics simulation of deposition and growth of cu thin film on si substrate
文献类型：会议论文
| 作者 | Zhang J(张俊) ; Liu C(刘崇); Shu YH(舒勇华); Fan J(樊菁)
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| 出版日期 | 2012 |
| 会议名称 | 28th International Symposium on Rarefied Gas Dynamics (RGD) |
| 会议日期 | JUL 09-13, 2012 |
| 会议地点 | Zaragoza, SPAIN |
| 关键词 | Thin film growth crystalline structure and orientation surface roughness molecular dynamics EMBEDDED-ATOM METHOD SURFACES SYSTEMS METALS |
| 卷号 | 1501 |
| 页码 | 919-925 |
| 通讯作者 | Zhang, J (reprint author), Chinese Acad Sci, State Key Lab High Temp Gas Dynam, Inst Mech, Beijing 100190, Peoples R China. |
| 中文摘要 | Growth and properties of Cu thin film deposited on Si substrate is studied using molecular dynamics method. Tersoff potential parameters for the interaction between Cu and Si are fitted to reproduce the lattice structure of copper silicide. We focus on the growth mode, crystalline structure and orientation, and surface morphology of Cu thin film. The effect of substrate temperature on the crystalline orientation and surface roughness is studied. |
| 收录类别 | CPCI |
| 产权排序 | [Zhang, Jun; Liu, Chong; Shu, Yonghua; Fan, Jing] Chinese Acad Sci, State Key Lab High Temp Gas Dynam, Inst Mech, Beijing 100190, Peoples R China |
| 会议网址 | http://dx.doi.org/10.1063/1.4769640 |
| 会议录 | 28TH INTERNATIONAL SYMPOSIUM ON RAREFIED GAS DYNAMICS 2012, VOLS. 1 AND 2
 |
| 会议录出版者 | AMER INST PHYSICS |
| 学科主题 | Engineering ; Aerospace; Astronomy & Astrophysics |
| 会议录出版地 | 2 HUNTINGTON QUADRANGLE, STE 1NO1, MELVILLE, NY 11747-4501 USA |
| 语种 | 英语 |
| ISSN号 | 0094-243X |
| ISBN号 | 978-0-7354-1115-9 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/46815]  |
| 专题 | 力学研究所_高温气体动力学国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Zhang J,Liu C,Shu YH,et al. Molecular dynamics simulation of deposition and growth of cu thin film on si substrate[C]. 见:28th International Symposium on Rarefied Gas Dynamics (RGD). Zaragoza, SPAIN. JUL 09-13, 2012.http://dx.doi.org/10.1063/1.4769640. |
入库方式： OAI收割
来源：力学研究所
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