Influence of an External Magnetic Field on the Growth of Nanocrystalline Silicon Films Grown by MF Magnetron Sputtering
文献类型：期刊论文
| 作者 | J. H. Gao ; L. Zhang ; J. Q. Xiao ; J. Gong ; C. Sun ; L. S. Wen |
| 刊名 | Journal of Materials Science & Technology
 |
| 出版日期 | 2012 |
| 卷号 | 28期号:11页码:992-998 |
| 关键词 | Nanocrystalline silicon Thin film Solenoid coil MF magnetron sputtering chemical-vapor-deposition amorphous-silicon thin-films microstructure temperature fabrication density si |
| ISSN号 | 1005-0302 |
| 中文摘要 | The effects of an external magnetic field originating from two solenoid coils on the magnetic field configuration, plasma state of a dual unbalanced magnetron sputter system and the structure of nanocrystalline Si films were examined. Numerical simulations of the magnetic field configuration showed that increasing the coil current significantly changed the magnetic field distribution between the substrate and targets. The saturated ion current density J(i) in the substrate position measured by using a circular flat probe increased from 0.18 to 0.55 mA/cm(2) with the coil current ranging from 0 to 6 A. X-ray diffraction and Raman results revealed that increasing the ion density near the substrate would benefit crystallization of films and the preferential growth along [111] orientation. From analysis of the surface morphology and the microstructure of Si films grown under different plasma conditions, it is found that with increasing the J(i), the surface of the film was smoothed and the alteration in the surface roughness was mainly correlated to the localized surface diffusion of the deposited species and the crystallization behavior of the films. |
| 原文出处 | |
| 公开日期 | 2013-02-05 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/59956]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | J. H. Gao,L. Zhang,J. Q. Xiao,et al. Influence of an External Magnetic Field on the Growth of Nanocrystalline Silicon Films Grown by MF Magnetron Sputtering[J]. Journal of Materials Science & Technology,2012,28(11):992-998. |
| APA | J. H. Gao,L. Zhang,J. Q. Xiao,J. Gong,C. Sun,&L. S. Wen.(2012).Influence of an External Magnetic Field on the Growth of Nanocrystalline Silicon Films Grown by MF Magnetron Sputtering.Journal of Materials Science & Technology,28(11),992-998. |
| MLA | J. H. Gao,et al."Influence of an External Magnetic Field on the Growth of Nanocrystalline Silicon Films Grown by MF Magnetron Sputtering".Journal of Materials Science & Technology 28.11(2012):992-998. |
入库方式： OAI收割
来源：金属研究所
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