Nanocrystalline silicon thin films grown by a MF twin magnetron sputtering system with two solenoid coils
文献类型：期刊论文
| 作者 | J. H. Gao ; L. Zhang ; J. Q. Xiao ; J. Gong ; C. Sun ; L. S. Wen |
| 刊名 | Materials Letters
 |
| 出版日期 | 2012 |
| 卷号 | 68页码:367-369 |
| 关键词 | Nanocrystalline silicon Thin films Solenoid coil Sputtering microcrystalline silicon fabrication deposition layer tool |
| ISSN号 | 0167-577X |
| 中文摘要 | A mid-frequency (MF) twin magnetron sputtering system combined with two external solenoid coils was developed to prepare nanocrystalline silicon (nc-Si) thin films. By varying the current strength of solenoid coils, different plasma conditions near substrate surface in an argon discharge were accomplished. Under different coil currents and Ar pressures, nc-Si films were successfully prepared and the maximal deposition rate reached around 30 nm/min with a power density of 1 W/cm(2). X-ray diffraction (XRD) analysis indicated that these films had a strong preferential growth along the (111) plane. The silicon film deposited at 1 Pa and 5.5 A showed a typical compact nanostructure of an nc-Si film. These results imply that the MF twin magnetron sputtering technique assisted by external magnetic fields is a potential method for the rapid deposition of high-quality nc-Si films. (C) 2011 Elsevier B.V. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2013-02-05 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/59957]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | J. H. Gao,L. Zhang,J. Q. Xiao,et al. Nanocrystalline silicon thin films grown by a MF twin magnetron sputtering system with two solenoid coils[J]. Materials Letters,2012,68:367-369. |
| APA | J. H. Gao,L. Zhang,J. Q. Xiao,J. Gong,C. Sun,&L. S. Wen.(2012).Nanocrystalline silicon thin films grown by a MF twin magnetron sputtering system with two solenoid coils.Materials Letters,68,367-369. |
| MLA | J. H. Gao,et al."Nanocrystalline silicon thin films grown by a MF twin magnetron sputtering system with two solenoid coils".Materials Letters 68(2012):367-369. |
入库方式： OAI收割
来源：金属研究所
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