Deposition, microstructure and hardness of TiN/(Ti,Al)N multilayer films
文献类型：期刊论文
| 作者 | Y. H. Zhao ; L. Hu ; G. Q. Lin ; J. Q. Xiao ; C. Dong ; B. H. Yu |
| 刊名 | International Journal of Refractory Metals & Hard Materials
 |
| 出版日期 | 2012 |
| 卷号 | 32页码:27-32 |
| ISSN号 | 0263-4368 |
| 关键词 | Pulse biased arc ion plating TiN/(Ti Al)N multilayer films TEM Hardness mechanical-properties thin-films superlattice films coatings tin stress growth performance transition monolayer |
| 中文摘要 | In this work, TiN/(Ti,Al)N multilayer films were deposited on stainless steel substrates with alternatively switching Ti and TiAl alloy targets sources on and off by pulse biased arc ion plating. The crystallography structures and cross-sectional structures of TiN/(Ti,Al)N multilayer films were evaluated by X-ray diffraction analysis (XRD) and by TEM, respectively. The hardness and film/substrate adhesion were determined by nanoindentation and scratch test, respectively. A complex set of microstructures has been found between TiN and (Ti,AI)N layers, at the interface, another layered interfacial region which consists of extremely fine sub-layers, which results from the rotation of the specimen in the deposition chamber. The hardness values of the multilayers exhibit higher hardness compared with that of monolithic (Ti,Al)N film. Crown Copyright (C) 2012 Published by Elsevier Ltd. All rights reserved. |
| 原文出处 | |
| 公开日期 | 2013-02-05 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/60491]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | Y. H. Zhao,L. Hu,G. Q. Lin,et al. Deposition, microstructure and hardness of TiN/(Ti,Al)N multilayer films[J]. International Journal of Refractory Metals & Hard Materials,2012,32:27-32. |
| APA | Y. H. Zhao,L. Hu,G. Q. Lin,J. Q. Xiao,C. Dong,&B. H. Yu.(2012).Deposition, microstructure and hardness of TiN/(Ti,Al)N multilayer films.International Journal of Refractory Metals & Hard Materials,32,27-32. |
| MLA | Y. H. Zhao,et al."Deposition, microstructure and hardness of TiN/(Ti,Al)N multilayer films".International Journal of Refractory Metals & Hard Materials 32(2012):27-32. |
入库方式： OAI收割
来源：金属研究所
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