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An Experimental Study of Carbon Dioxide Condensation in Mini Channels

文献类型:期刊论文

作者Xiulan HUAIl ; Shigeru KOYAMA2
刊名JOURNAL OF THERMAL SCIENCE
出版日期2004
卷号13期号:4页码:358,365
关键词carbon dioxide condensation heat transfer pressure drop mini channels.
英文摘要For the purpose of decomposing the processing gases CF4 from semiconductor manufacturers, ceramic honeycomb regenerative burner system is suggested by using the principle of HTAC. A simulated high temperature air combustion furnace has been used to determine the features of HTAC flames and the results of the decomposition of CF4. The preheat air temperature of it is above 900°C. The exhaust gas released into the atmosphere is lower than 150°C. Moreover, the efficiency of recovery of waste heat is higher than 80%, the NOx level in exhaust gas is less than 198 mg/m3 and the distribution of temperature in the furnace is nearly uniform. The factors influencing on heat transfer, temperature profile in chamber and NOx emission were discussed. Also some CF4 can be decomposed in this system
WOS记录号WOS:000208228300012
公开日期2013-03-11
源URL[http://ir.etp.ac.cn/handle/311046/53382]  
专题工程热物理研究所_Journal of Thermal Science_期刊论文
推荐引用方式
GB/T 7714
Xiulan HUAIl,Shigeru KOYAMA2. An Experimental Study of Carbon Dioxide Condensation in Mini Channels[J]. JOURNAL OF THERMAL SCIENCE,2004,13(4):358,365.
APA Xiulan HUAIl,&Shigeru KOYAMA2.(2004).An Experimental Study of Carbon Dioxide Condensation in Mini Channels.JOURNAL OF THERMAL SCIENCE,13(4),358,365.
MLA Xiulan HUAIl,et al."An Experimental Study of Carbon Dioxide Condensation in Mini Channels".JOURNAL OF THERMAL SCIENCE 13.4(2004):358,365.

入库方式: OAI收割

来源:工程热物理研究所

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