Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application
文献类型：期刊论文
| ; | |
| 作者 | Shi YB (Shi, Yunbo); Guo H (Guo, Hao); Ni HQ (Ni, Haiqiao); Xue CY (Xue, Chenyang); Niu ZC (Niu, Zhichuan); Tang J (Tang, Jun); Liu J (Liu, Jun); Zhang WD (Zhang, Wendong); He JF (He, Jifang); Li MF (Li, Mifeng) |
| 刊名 | materials
 ; MATERIALS
|
| 出版日期 | 2012 ; 2012 |
| 卷号 | 5期号:12页码:2917-2926 |
| 学科主题 | 半导体物理 ; 半导体物理 |
| 收录类别 | SCI |
| 语种 | 英语 ; 英语 |
| 公开日期 | 2013-03-26 ; 2013-03-26 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/23768]  |
| 专题 | 半导体研究所_半导体超晶格国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Shi YB ,Guo H ,Ni HQ ,et al. Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application, Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application[J]. materials, MATERIALS,2012, 2012,5, 5(12):2917-2926, 2917-2926. |
| APA | Shi YB .,Guo H .,Ni HQ .,Xue CY .,Niu ZC .,...&Yu Y .(2012).Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application.materials,5(12),2917-2926. |
| MLA | Shi YB ,et al."Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application".materials 5.12(2012):2917-2926. |
入库方式： OAI收割
来源：半导体研究所
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