Diagnostics of electron temperature and density in a capillary predischarge Ar plasma (EI CONFERENCE)
文献类型：会议论文
| 作者 | Zhao Y.; Xie Y. ; Zhao Y.; Zhao Y.
|
| 出版日期 | 2011 |
| 会议名称 | 2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011, October 12, 2011 - October 16, 2011 |
| 会议地点 | Harbin, China |
| 关键词 | The spectra of the argon plasma generated by capillary predischarge are observed in the experiments. The electron temperature and density are obtained with the method of spectrum analysis. The electron temperatures are approximately 0.7eV and the electron densities are about 11022 m-3. When increasing the pressure the electron temperature decreases and the electron density increases on the contrary. 2011 IEEE. |
| 页码 | 130-133 |
| 收录类别 | EI |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/32996]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文 |
| 推荐引用方式 GB/T 7714 | Zhao Y.,Xie Y.,Zhao Y.,et al. Diagnostics of electron temperature and density in a capillary predischarge Ar plasma (EI CONFERENCE)[C]. 见:2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011, October 12, 2011 - October 16, 2011. Harbin, China. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。