中国科学院机构知识库网格系统: Autocollimation form dual-frequency laser diffraction grating interferometer design and analysis (EI CONFERENCE)

中国科学院机构知识库网格

Chinese Academy of Sciences Institutional Repositories Grid

Autocollimation form dual-frequency laser diffraction grating interferometer design and analysis (EI CONFERENCE)

文献类型：会议论文


作者	Wang C.-G.
出版日期	2010
会议名称	2010 International Conference on Computer, Mechatronics, Control and Electronic Engineering, CMCE 2010, August 24, 2010 - August 26, 2010
会议地点	Changchun, China
关键词	Propose a new measurement system of autocollimation form laser grating heterodyne interferometer. Take grating diffraction and polarization optics as theoretical foundation second furthermore combined with electronics knowledge to analyze the system. First make use of autocollimation diffraction of grating measurement information obtained by dual-frequency laser belongs to ac signal the interferometer measurement system take grating pitch as measuring datum the structure is simple possess great gain and high signal-noise ratio therefore stable completely overcome the disadvantages of DC level drift caused by light intensity variation of single-frequency laser system can achieve nanometer resolution. 2010 IEEE. reduce the impact of environmental factors easy to install and debug measurement error is small
页码	148-150
收录类别	EI
源URL	[http://ir.ciomp.ac.cn/handle/181722/33029]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Wang C.-G.. Autocollimation form dual-frequency laser diffraction grating interferometer design and analysis (EI CONFERENCE)[C]. 见:2010 International Conference on Computer, Mechatronics, Control and Electronic Engineering, CMCE 2010, August 24, 2010 - August 26, 2010. Changchun, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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