中国科学院机构知识库网格系统: Observations and analysis of extreme ultraviolet emission between 10nm and 70nm by capillary discharge with Xe as target (EI CONFERENCE)

中国科学院机构知识库网格

Chinese Academy of Sciences Institutional Repositories Grid

Observations and analysis of extreme ultraviolet emission between 10nm and 70nm by capillary discharge with Xe as target (EI CONFERENCE)

文献类型：会议论文


作者	Yang L.; Yang L.
出版日期	2011
会议名称	2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011, October 12, 2011 - October 16, 2011
会议地点	Harbin, China
关键词	Spectra have been recorded from a Xe discharge capillary discharge source in the extreme ultraviolet (EUV) region between 10nm and 70nm. The origin of the spectra have been analyzed which have shown that the spectra between 10nm and 20nm come from the transitions of 4p-4d 4d-4f and 4d-5p by Xe 7+Xe12+ and the spectra between 20nm70nm mainly from the transitions of Xe6+Xe8+ as well. The results which have been integrated the experimental results with the theory have shown that the spectra from Xe6+Xe8+ formed in the time after the collapsed of the compressing of the plasma. 2011 IEEE.
页码	160-163
收录类别	EI
源URL	[http://ir.ciomp.ac.cn/handle/181722/33056]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Yang L.,Yang L.. Observations and analysis of extreme ultraviolet emission between 10nm and 70nm by capillary discharge with Xe as target (EI CONFERENCE)[C]. 见:2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011, October 12, 2011 - October 16, 2011. Harbin, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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