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A novel method for fabrication of integrated shadow mask for patterning electrode in passive matrix OLED displays (EI CONFERENCE)

文献类型：会议论文

作者Huang Z. H. ; Su W. M. ; Qi G. J. ; Lu H. J. ; Zeng X. T. ; Wong S.
出版日期2004
会议名称6th Electronics Packaging Technology Conference, EPTC 2004, December 8, 2005 - December 10, 2005
会议地点Singapore, Singapore
关键词This paper reports a novel method for making an integrated shadow mask used in fabrication of passive matrix OLED displays. Common positive and negative photoresists were employed to produce retrograded strip pillars with large overhang and undercut by photolithography. The pillar strips serve as an effective shadow mask for patterning the organic layers and the metal cathodes in OLED display devices. It is expected that this method can significantly enhance the performance of passive matrix OLED at a low shadow mask fabrication cost. The method can be used for fabricating more complicated structures for other display applications. 2004 IEEE.
页码169-171
收录类别EI
源URL[http://ir.ciomp.ac.cn/handle/181722/33071]  
专题长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式
GB/T 7714		 Huang Z. H.,Su W. M.,Qi G. J.,et al. A novel method for fabrication of integrated shadow mask for patterning electrode in passive matrix OLED displays (EI CONFERENCE)[C]. 见:6th Electronics Packaging Technology Conference, EPTC 2004, December 8, 2005 - December 10, 2005. Singapore, Singapore.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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