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Research on load-bearing characteristics of precision air-bearing rotary stage (EI CONFERENCE)

文献类型：会议论文

作者Wang L.; Wang L.; Wang L.; Lin J.
出版日期2012
会议名称3rd international Conference on Manufacturing Science and Engineering, ICMSE 2012, March 27, 2012 - March 29, 2012
会议地点Xiamen, China
关键词Air-bearing is a core component of air-bearing rotary stage. The weakness that the air-bearing has the low load capacity and stiffness has been concerned about by domestic and foreign scholars. So how to improve the load capacity and stiffness has become a serious problem. In order to improve the load capacity and stiffness of the air-bearing rotary stage in this paper we improved structure of Zhang Wenjie and others' high-precision direct-drive air-bearing rotary stage. The gas film of air-bearing has been meshed by GAMBIT software and we use FLUENT software to obtain the carrying capacity features of the gas film. Finally the structural static force of the precision air-bearing rotary stage will be analyzed by ANSYS software. The analysis results show that: the structural design of the precision air-bearing rotary stage is reasonable and this structure can provide a larger range of loads. Even in heavy load conditions a larger deformation will not occur any more. It has a good practical value and also can be widely used in high precision equipments. (2012) Trans Tech Publications.
页码2129-2134
收录类别EI
源URL[http://ir.ciomp.ac.cn/handle/181722/33135]  
专题长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式
GB/T 7714		 Wang L.,Wang L.,Wang L.,et al. Research on load-bearing characteristics of precision air-bearing rotary stage (EI CONFERENCE)[C]. 见:3rd international Conference on Manufacturing Science and Engineering, ICMSE 2012, March 27, 2012 - March 29, 2012. Xiamen, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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