中国科学院机构知识库网格系统: Study on optical parts of MOEMS optical switch with low insertion loss (EI CONFERENCE)

中国科学院机构知识库网格

Chinese Academy of Sciences Institutional Repositories Grid

Study on optical parts of MOEMS optical switch with low insertion loss (EI CONFERENCE)

文献类型：会议论文


作者	Wang W.; Wang L.; Wang L.; Wang L.; Chen W.; Wang W.
出版日期	2004
会议名称	MEMS/MOEMS Technologies and Applications II, November 10, 2004 - November 12, 2004
会议地点	Beijing, China
关键词	We study insertion losses of optical switch when the laser beam is propagating during the free space between two single mode fibers (SMFs) and the related assemblage challenges Then a new packaging structure is developed for the hybrid-integration of free-space MOEMS (micro-opto-electro-mechanical systems) chip with a silicon micromachined submount to improve alignment accuracy. The submount is designed to accommodate various free-space MOEMS chips with minimal active optical alignment thus reducing the packaging cost. The silicon submount has a central recess to place the MOEMS chip in sixteen V-grooves for optical fibers and micropits for micro ball lenses all bulk micromachined at the same time by a single anisotropic wet etching step. A corner compensation technique is employed to prevent erosion of the convex corners where different geometries meet. Through this assembling method the fiber micro ball lens can be aligned preciously thus reduced lateral and angular misalignment between them. Then total insertion losses can be decreased.
页码	323-332
收录类别	EI
源URL	[http://ir.ciomp.ac.cn/handle/181722/33269]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Wang W.,Wang L.,Wang L.,et al. Study on optical parts of MOEMS optical switch with low insertion loss (EI CONFERENCE)[C]. 见:MEMS/MOEMS Technologies and Applications II, November 10, 2004 - November 12, 2004. Beijing, China.

入库方式： OAI收割

来源：长春光学精密机械与物理研究所

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